Microelectronic Engineering

Special Issues

2005

14th Biennial Conference on Insulating Films on Semiconductors
Edited by G. Groeseneken and B. Kaczer

Volume 80, 17 June 2005

Proceedings of the 30th International Conference on Micro- and Nano-Engineering
Edited by P. Kruit and E.W.J.M. van der Drift

Volume 78-79, March 2005

2004

Proceedings of the European Workshop on Materials for Advanced Metallization 2004 (MAM 2004)
Edited by Gerald Beyer, Karen Maex, Muriel de Potter

Volume 76, Issue 1-4, October 2004

Proceedings of the Symposium on Characterization and Mechanical Reliablility of Advanced Electronic Materials at Nanoscale, 2003 ASME Mechanics and Materials Conference
Edited by A.A. Volinsky

Volume 75, Issue 1, July 2004

Micro and Nano Engineering 2003
Edited by J.R.A. Cleaver

Volume 73-74, June 2004

13th Biennial Conference on Insulating Films on Semiconductors
Edited by Joan Ramon Morante Lleonart

Volume 72, Issue 1-4, April 2004

2003

NGCM 2002

Volume 69, Issue 2-4, 2003

MNE 2002 - Proceedings of the 28th International Conference on Micro- and Nano-Engineering.
Edited by J. Brugger, J. Gobrecht, H. Rothuizen, U. Staufer, P. Vettiger

Volume 67-68, 2003

IUMRS-ICEM2002
Edited by S. Fan, Y. Han, Z. L. Wang, D. Yang, Z. G. Liu

Volume 66, Issue 1-4, 2003

2002

MAM2002
Edited by Siegfried Mantl, Stephan Winnerl, Susan Hogg

Volume 64, Issue 1-4, October 2002

NMPS 2001, New Phenomena in Mesoscopic Structures
Edited by T. Ando, C. Hamaguchi

Volume 63, Issue 1-3, August 2002

Micro- and Nano-Engineering 2001 (MNE2001)
Edited by O. Joubert, J. Perrocheau, S. Tedesco

Volume 61-62, Issue 1, July 2002

MAM 2001
Edited by S.-L. Zhang, M. Õstling

Volume 60, Issue 1-2, January 2002

2001

INFOS 2001
Edited by E. Sangiorgi, L. Selmi

Volume 59, Issue 1-4, November 2001

Micro- and Nano-Engineering 2000 (MNE 2000)
Edited by O. Fortagne, D.P. Kern, U. Behringer

Volume 57-58, September 2001

MNE 2000
Edited by O. Fortagne, D. P. Kern, U. Behringer

Volume 57-58, 2001

Proceedings of the E-MRS IUMRS ICEM 2000 Meeting
Edited by H. Fußstetter, H. Richter, M. Umeno

Volume 56, Issue 1-2, May 2001

MAM 2000
Edited by G. de Santi, G. Ottaviani

Volume 55, Issue 1-4, March 2001

2000

MNE '99
Edited by M. Gentili, E. Di Fabrizio, G. Meneghini

Volume 53, Issue 1-4, June 2000

LDSD '99
Edited by M. Henini

Volume 51-52, 2000

1999

Proceedings of the Third European Workshop on Materials for Advanced Metallization Ostende, Belgium, March 7-10 (1999 MAM 1999)
Edited by A. Vantomme, M. de Potter, M. Baklanov, K. Maex

Volume 50, Issue 1-4, 1999

Migas International Summer school on Advanced Microelectronics-Grenoble
Edited by G. Reimbold, J. Boussey

Volume 49, Issue 1-2, 1999

Insulating films on semiconductors
Edited by M. Schulz, R. Brendel

Volume 48, Issue 1-4, 1999

NPMS 98 - New Phenomena in Mesoscopic Structures
Edited by T. Ando, C. Hamaguchi, S. Namba

Volume 47, Issue 1-4, 1999

Micro- and Nano- Engineering 98 (MNE 1998)
Edited by L. Van den hove, K. Ronse, M. Van Rossum

Volume 46, Issue 1-4, 1999

1998

LDSD'97
Edited by M. Henini

Volume 43-44, 1998

Micro- and Nano- Engineering 97 (MNE 1997)
Edited by M. Hatzakis, E. Gogolides

Volume 41-42, 1998

MIGAS
Edited by G. Ghibaudo, J. Boussey

Volume 40, Issue 3-4, 1998

1997

MIGAS
Edited by S. Cristoloveanu, J. Boussey

Volume 39, 1997

MAM'97
Edited by G. Bomchil, D. Célier, R. Madar, J. Torres

Volume 37-38, 1997

Micro- and Nano- Engineering 96 (MNE 1996)
Edited by S.P. Beaumont, C.D.W. Wilkinson

Volume 35, 1997

Microfabrication of Differactive Optical Elements
Edited by M. Gentili

Volume 34, Issue 3-4, 1997

1996

Jessi Basic ? Long-Term Research Advanced CMOS Cluster Workshop
Edited by De Keersmaecker, R.

Volume 34, Issue 1, December 1996

Jessi Basic &Long-Term Research Advanced CMOS Cluster Workshop, Brussels, Belgium, 29-30 March 1995
Edited by R. De Keersmaecker

Volume 34, Issue 1-2, 1996

1997

Proceedings of the Symposium J on Advanced Materials for Interconnections of the 1996 E-MRS Spring Meeting Conference Strasbourg, France, June 4-7, 1996
Edited by T. Gessner, J. Torres, G. Crean

Volume 33, Issue 1-4, January 1997

1996

Nanotechnology
Edited by P. Vettiger, U. Staufer, D.P. Kern

Volume 32, 1996

Proceedings of the Fifth European Conference on Electron and Optical Beam Testing of Elec
Edited by E. Wolfgang, B. Courtois, L.J. Balk

Volume 31, Issue 1-4, February 1996

Proceedings of the International Conference on Micro- and Nanofabrication
Edited by J. Perrocheau

Volume 30, Issue 1-4, January 1996

1995

Proceedings of the 1st European Meeting on Integrated Ferroelectrics
Edited by P.K. Larsen, G.J.M. Dormans

Volume 29, Issue 1-4, December 1995

INFOS'95
Edited by S. Cristoloveanu, N. Gillemot

Volume 28, 1995

Micro- and Nano- Engineering 94 (MNE 1994)
Edited by H.W. Lehmann, U. Staufer, P. Vettiger

Volume 27, 1995

1994

Integrated Processing for Micro and Optoelectronics
Edited by Y.I. Nissim, G.W. Rubloff, A. Katz

Volume 25, Issue 2-4, 1994

Electron and Optical Beam Testing of Electronic Devices
Edited by A. Birolini, M. Ciappa, E. Wolfgang

Volume 24, 1994

International Conference on Microfabrication
Edited by S. Radelaar, J. Romijn, E. van der Drift

Volume 23, 1994

1993

INFOS'93
Edited by P. Balk, J.J.M. de Nijs

Volume 22, 1993

Microcircuit Engineering 92
Edited by H. Ryssel, D. Stephani

Volume 21, 1993

Laser Processing in Microelectronics
Edited by W. Zapka

Volume 20, Issue 1-2, 1993

1992

Solid State Device Research 92
Edited by H.E. Maes, R.P. Mertens, R.J. Van Overstraeten

Volume 19, 1992

MOVPE for Opto- and Microelectronics
Edited by D. Schmitz, H. Jürgensen

Volume 18, Issue 1-2, 1992

Microcircuit Engineering 91
Edited by A. Tucciarone, A. Paoletti, P. Paroli

Volume 17, 1992

Electron and Optical Beam Testing of Integrated Circuits
Edited by M. Melgara, E. Wolfgang, B. Courtois, F. Fantini

Volume 16, 1992

1991

Solid State Device Research 91
Edited by M. Ilegems, M. Dutoit

Volume 15, 1991

Microcircuit Engineering 90
Edited by G. Declerck, L. Van den Hove, F. Coopmans

Volume 13, 1991

1990

Electron and Optical Beam Testing of Integrated Circuits
Edited by E. Kubalek, E. Wolfgang

Volume 12, 1990

Microcircuit Engineering 89
Edited by H. Ahmed, J.R.A. Cleaver, G.A.C. Jones, R.A.M. McMahon, A.N. Broers

Volume 11, 1990

1991

Semiconductor Manufacturing Science
Edited by G. Declerck, K. de Meyer

Volume 10, Issue 3-4, 1991

1989

Microcircuit Engineering 88
Edited by F. Paschke, W. Fallmann, H. Löschner

Volume 9, 1989